Semiconductor

Compound Semiconductor Polishing Slurry

Polycrystalline Diamond Slurry

3μm 1μm

Polycrystalline diamond slurry is suitable for the pre-finish polishing of compound semiconductors.
We can also provide the finishing slurry of the silica, aluminum.

 

 

Nanodiamond Slurry

Nanodiamond slurry also meets many polishing needs such as the pre-finish polishing of compound semiconductors. Conventionally, final polishing is carried out by using polishing slurry and a polishing pad, but in our polishing method, the use of a nano-level ultra-fine particle diamond slurry removes the need of using a polishing pad and still allows nano level finishing.

 

Polishing Process for GaN

Diamond 2-4μm 0-2μm 0.03μm
Ra (Zygo)
Wa (Zygo)

 

Polishing Process for SiC

Diamond 2-4μm 0-2μm 0.03μm
Ra (Zygo)
Wa (Zygo)